Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 14, 2009
Patent Application Number
11312612
Date Filed
December 21, 2005
Patent Primary Examiner
Patent abstract
A pattern specification method for specifying a drawn microscopic pattern, comprising the step of creating a first pattern in which process shift information is reflected on a pattern expressed by design data, the step of enlarging the drawn pattern, the step of performing pattern matching between the first pattern which corresponds to the drawn pattern to-be-specified or a pattern which include patterns surrounding this first pattern and the enlarged pattern or an enlarged pattern which includes enlarged patterns surrounding this enlarged pattern, and the step of outputting the enlarged pattern which matches most in the pattern matching.
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