US Patent 7520285 Apparatus and method for processing a substrate
Patent 7520285 was granted and assigned to Lam Research on April, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 30, 2004
Date of Patent
April 21, 2009
Patent Application Number
10957260
Patent Inventor Names
James P. Garcia
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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