Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zhihong Wang0
Jose Salas-Vernis0
Shi-Ping Wang0
Wei-Yung Hsu0
Alain Duboust0
Antoine P. Manens0
Date of Patent
April 21, 2009
0Patent Application Number
114682670
Date Filed
August 29, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A retaining ring for chemical mechanical polishing is described. The ring has a bottom surface with non-intersecting grooves. Alternating grooves are at opposing angles to one another.
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