US Patent 7521801 Semiconductor device
Patent 7521801 was granted and assigned to Panasonic on April, 2009 by the United States Patent and Trademark Office.
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Patent abstract
A Ti barrier film and a TiN barrier film are formed between a top-level pad made of copper or an alloy film mainly composed of copper and an Al pad. The Ti barrier film is formed to have a greater thickness than the TiN barrier film.
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US Patent 07521801 Semiconductor device US Patent 7521801 Semiconductor device
Infobox
Patent Number
0752180100
Patent Number
752180100
Edits on 22 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
075218010
Date of Patent
April 21, 2009
0Patent Application Number
115845610
Date Filed
October 23, 2006
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
075218010
Date of Patent
April 21, 2009
0Patent Application Number
115845610
Date Filed
October 23, 2006
0Official Website
Patent Primary Examiner
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US Patent 07521801 Semiconductor device
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07521801
Date of patent
April 21, 2009
Patent application number
11584561
Date Filed
October 23, 2006
Patent primary examiner
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