Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tsuyoshi Ohtsuki0
Hideki Sato0
Date of Patent
April 28, 2009
0Patent Application Number
116595320
Date Filed
June 13, 2005
0Patent Primary Examiner
Patent abstract
An apparatus for evaluating an electric characteristic of a semiconductor wafer including, at least, a wafer cassette section on which a wafer cassette for storing the semiconductor wafer that is an object to be evaluated is placed, a wafer pretreatment section for pretreating the semiconductor wafer in order to evaluate the electric characteristic thereof, a mercury probe section for evaluating the electric characteristic of the semiconductor wafer by using a mercury probe, and an automatic transport part for transporting the semiconductor wafer to each of the sections.
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