Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 5, 2009
Patent Application Number
11615730
Date Filed
December 22, 2006
Patent Primary Examiner
Patent abstract
A complementary metal oxide silicon (CMOS) image sensor includes a pad protection layer having a dual-layer structure including a plasma enhanced-tetra ethyl ortho silicate (PE-TEOS) layer as a lower layer and a thermo-setting resin layer as an upper layer. The thermo-setting resin layer is removed before a micro-lens process and after a planarization process. The plasma enhanced-tetra ethyl ortho silicate (PE-TEOS) layer is removed after the planarization process and the micro-lens process.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
