Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Huatan Qiu0
Martin J. Neumann0
Brian E. Jurczyk0
Darren Alman0
David N. Ruzic0
Date of Patent
May 5, 2009
0Patent Application Number
112939030
Date Filed
December 5, 2005
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
A system for non-contact cleaning of particulate contamination of surfaces includes one or more sources that create a charge imbalance between a surface and particles that contaminate the surface, and a power supply that creates a pulsed electrical bias on the surface. This imbalance produces an electrostatic force that propels the particles off the surface. The cleaning process can be associated, for example, with microelectronic lithography and manufacturing.
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