Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 5, 2009
Patent Application Number
10986178
Date Filed
November 12, 2004
Patent Primary Examiner
Patent abstract
An immersion lithographic projection apparatus is disclosed in which liquid is provided between a projection system of the apparatus and a substrate. The use of both liquidphobic and liquidphilic layers on various elements of the apparatus is provided to help prevent formation of bubbles in the liquid and to help reduce residue on the elements after being in contact with the liquid.
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