Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Trung T. Doan0
Douglas R. McAllister0
Jeffrey Schmidt0
Stacy Meyer0
Date of Patent
May 12, 2009
0Patent Application Number
112331540
Date Filed
September 21, 2005
0Patent Primary Examiner
Patent abstract
Techniques for attaching a retaining ring to a carrier head so that the bottom surface of the retaining ring is orthogonal to a central rotational axis of the carrier head are described.
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