Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Koji Sumi0
Date of Patent
May 12, 2009
0Patent Application Number
115010400
Date Filed
August 9, 2006
0Patent Primary Examiner
Patent abstract
An actuator device including vibration plates formed on one side of a substrate; and piezoelectric elements mounted through the vibration plates and each including a lower electrode, a piezoelectric layer, and an upper electrode, wherein a ratio d31/S11E of a piezoelectric constant d31 of the piezoelectric layer to an elastic compliance S11E of the piezoelectric layer is greater than 5 C/m2, and the elastic compliance S11E of each vibration plate is greater than 2×10−8 m2/N.
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