Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mun Sik Kim0
Date of Patent
May 12, 2009
Patent Application Number
12112862
Date Filed
April 30, 2008
Patent Primary Examiner
Patent abstract
An apparatus for removing haze in a photo mask includes sealed chamber having a bake module disposed therein to support a photo mask, a reactant gas feed line to feed a reactant gas into the chamber, and a discharge device to discharge impurities in the chamber to the outside.
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