US Patent 7531286 Radiation-sensitive resin composition
Patent 7531286 was granted and assigned to JSR Corporation on May, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 13, 2003
Date of Patent
May 12, 2009
Patent Application Number
10386707
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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