Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 12, 2009
Patent Application Number
12133532
Date Filed
June 5, 2008
Patent Primary Examiner
Patent abstract
A composition for the production of semiconductors, comprising H2SiF6 and/or HBF4 in a total amount of 10-500 mg/kg, 1-17 % by weight of H2S04, 1-15% by weight of H202, optionally in combination with additives, in aqueous solution and a process of removing residual polymers using the composition.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
