Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Henry A. Hill0
Date of Patent
May 12, 2009
Patent Application Number
11504455
Date Filed
August 15, 2006
Patent Primary Examiner
Patent abstract
Methods and systems for determining information about the incident angle of a beam are disclosed, the method including directing a beam having an s-polarized component and a p-polarized component to reflect from an interface at a non-normal angle, where the non-normal reflection introduces for each component a phase change upon reflection that is different for each component, and measuring an optical interference signal related to the phase change between the components of the reflected beam.
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