US Patent 7536922 Force sensor chip

Patent 7536922 was granted and assigned to Honda on May, 2009 by the United States Patent and Trademark Office.

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Patent Inventor Names

Nobuhiro Sakurai0

Takeshi Ohsato0

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Patent abstract

In a force sensor chip, a semiconductor substrate includes: a plurality of operating parts each including an external-force acting area section and a non-deforming section; a supporting part for supporting the operating parts, and a plurality of connecting parts for connecting the operating parts and the supporting part. Strain resistance elements are provided on deformation-generating sections of the connecting parts. The plurality of operating parts are provided, in corresponding relation to the plurality of connecting parts, between the connecting parts and the supporting part.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=075369220

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