Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
William Ralph Knowles0
Milos Toth0
Date of Patent
June 2, 2009
0Patent Application Number
117317430
Date Filed
March 30, 2007
0Patent Primary Examiner
Patent abstract
A detector for use with a high pressure SEM, such as an ESEM® environmental SEM from FEI Company, extends the effective detection space above the PLA, thereby increasing secondary signal amplification without increasing working distance or pressure. Embodiments can therefore provide improved resolution and can operate at lower gas pressures.
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