US Patent 7541824 Forced air cooling of components on a probecard

Patent 7541824 was granted and assigned to Verigy on June, 2009 by the United States Patent and Trademark Office.

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Patent Number

Date of Patent

June 2, 2009

Patent Application Number

11639010

Date Filed

December 14, 2006

Patent Primary Examiner

Patent abstract

A probe card with an air channel over the active components for cooling the active components on the probe card is provided.

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