Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Matthew R. Boston0
Chris L. Koliopoulos0
Date of Patent
June 2, 2009
0Patent Application Number
111295370
Date Filed
May 13, 2005
0Patent Primary Examiner
Patent abstract
A platform is designed to support thin flat substrates, such as semiconductor wafers, during observation of characteristics of the substrates. The platform includes a rigid base having a top surface. A resilient pad is supported on the base and the pad has a top surface, at least a portion of which yieldingly supports a flat substrate placed thereon.
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