Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Junya Tanaka0
Tatsuhiko Okita0
Masashi Kitazawa0
Masaki Tanemura0
Date of Patent
June 9, 2009
Patent Application Number
11710974
Date Filed
February 27, 2007
Patent Primary Examiner
Patent abstract
A carbon thin line probe having a carbon thin line selectively formed at a projection-like terminal end portion thereof by means of an irradiation of high-energy beam, the carbon thin line internally containing a metal. Thereby achieved is a carbon thin line probe suitable for example for the probe of SPM cantilever, which has a high aspect ratio and high durability and reliability, capability of batch processing based on a simple manufacturing method, and to which magnetic characteristic can be imparted.
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