Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takamichi Fujii0
Yukio Sakashita0
Date of Patent
June 9, 2009
0Patent Application Number
112945410
Date Filed
December 6, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of manufacturing a ceramic film by using an AD method, by which a film having good crystallinity can be fabricated without using a high-temperature process. The method of manufacturing a ceramic film by using an aerosol including the steps of: (a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol; and (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing the ceramic raw material powder on the substrate to form a ceramic film.
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