Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 9, 2009
Patent Application Number
11498413
Date Filed
August 3, 2006
Patent Primary Examiner
Patent abstract
A heating device is provided, including a ceramic base in which a resistance heating body is embedded, gas flow passages formed in an inside portion of the base, and adjustment members which vary flow rates of a gas provided in the gas flow passages.
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