Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Paul Graupner0
Johannes Catharinus Hubertus Mulkens0
Johannes Jacobus Matheus Baselmans0
Nicodemus Hattu0
Bernard Gellrich0
Bob Streefkerk0
Christiaan Alexander Hoogendam0
Erik Roelof Loopstra0
...
Date of Patent
June 9, 2009
0Patent Application Number
107196830
Date Filed
November 24, 2003
0Patent Primary Examiner
Patent abstract
The joint between the projection system element and its support comprises an inorganic layer or a direct bond and is thus liquid tight, which can prevent deformation by an immersion liquid. The joint can be made either warm or cold. Solders, glue, and glue protection can all be used in the formation of this joint. In an embodiment, the elements and its support are made of quartz.
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