US Patent 7547899 Charged beam dump and particle attractor
Patent 7547899 was granted and assigned to Axcelis Technologies on June, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 2, 2006
Date of Patent
June 16, 2009
Patent Application Number
11445677
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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