Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 16, 2009
Patent Application Number
11655999
Date Filed
January 22, 2007
Patent Primary Examiner
Patent abstract
A method of transferring an image of a pattern layout onto a surface of a substrate including selecting a first illumination profile for a first area of the pattern layout and a second illumination profile for a second area of the pattern layout; switching illumination profile during transfer of the image of the pattern layout such that the first area of the pattern layout is illuminated with the first illumination profile and the second area is illuminated with the second illumination profile; and projecting an image of the illuminated first and second areas onto the surface of the substrate.
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