Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hideki Iwata0
Takashi Yuba0
Hirofumi Saso0
Date of Patent
June 23, 2009
0Patent Application Number
106348760
Date Filed
August 6, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A micro-relay includes a first substrate having stationary contacts and a stationary electrode, a second substrate arranged so as to face the first substrate, and a movable plate arranged between the first and second substrates. The movable plate has a frame and a movable portion. The frame is sandwiched between the first and second substrates to realize a hermetical sealed structure. The movable portion has a movable electrode facing the stationary electrode, and a movable contact faces the stationary contacts. The movable portion moves between the first and second substrates due to electrostatic attraction that develops between the movable electrode and the stationary electrode.
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