Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Romain Sappey0
Steven W. Meeks0
Tom Carr0
Date of Patent
June 30, 2009
Patent Application Number
11627677
Date Filed
January 26, 2007
Patent Citations Received
Patent Primary Examiner
Patent abstract
In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a scatterometer to identify at least one defect region on the surface and a surface profile height measuring tool to measure one or more characteristics of the surface in the defect region with a surface profile height measuring tool.
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