US Patent 7554711 MEMS devices with stiction bumps
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Patent Inventor Names
Mark W. Miles0
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Patent abstract
An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.
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US Patent 07554711 MEMS devices with stiction bumps US Patent 7554711 MEMS devices with stiction bumps
Infobox
Patent Number
075547110
Patent Number
75547110
Edits on 24 Mar, 2023
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Patent Jurisdiction
Patent Number
075547110
Date of Patent
June 30, 2009
0Patent Application Number
114925350
Date Filed
July 24, 2006
0Official Website
Patent Primary Examiner
Edits on 18 Jun, 2022
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US Patent 07554711 MEMS devices with stiction bumps
Infobox
Is a
Patent jurisdiction
Patent number
07554711
Date of patent
June 30, 2009
Patent application number
11492535
Date Filed
July 24, 2006
Patent primary examiner
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