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US Patent 7555938 Thermoelastic self-actuation in piezoresistive resonators

Patent 7555938 was granted and assigned to California Institute of Technology on July, 2009 by the United States Patent and Trademark Office.

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Patent abstract

Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.

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