Patent attributes
A method for fabrication a memory having a memory area and a peripheral area includes forming a first gate insulating layer with a first thickness over a substrate of a first region in the peripheral area and a second insulating layer with a second thickness over the substrate of the memory region. Thereafter, a buried diffusion region is formed in the substrate of the memory area. A charge trapping layer and a third insulating layer are formed over the substrate. A gate insulating layer is formed in the second region in the peripheral area, wherein the first thickness is greater than a second thickness after removing the charge trapping layer and third insulating layer on the first and second region in the peripheral area. A conductive layer is formed over the substrate of the memory area and the peripheral area substantially after the gate insulating layer is formed.
