Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
July 7, 2009
Patent Application Number
11078381
Date Filed
March 14, 2005
Patent Primary Examiner
Patent abstract
A flat panel display device may include an insulating substrate with a conductive layer pattern formed of Mo layer or Mo alloy layer having a tensile stress thereon. A silicon nitride or silicon oxynitride layer may be located on the conductive layer pattern. With such an arrangement, one can achieve stress balance between the conductive layer pattern and the insulating layer, and improve the adhesion characteristics between the conductive layer pattern and the insulating layer.
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