Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Vladimir Kochergin0
Marc Christophersen0
Date of Patent
July 14, 2009
Patent Application Number
11038500
Date Filed
January 21, 2005
Patent Primary Examiner
Patent abstract
Methods and apparatus for providing closed-loop control over an electrochemical etching process during porous semiconductor fabrication enhance the quality of the porous semiconductor materials, especially those contained structural variations (such as porosity or morphology variations) along the thickness of said porous semiconductors. Such enhancement of the control over the electrochemical etching process is highly desired for many applications of porous semiconductor materials.
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