US Patent 7560037 Surfactant-enhanced protection of micromechanical components from galvanic degradation
Patent 7560037 was granted and assigned to Altera on July, 2009 by the United States Patent and Trademark Office.
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A microelectromechanical structure is formed by depositing sacrificial and structural material over a substrate to form a structural layer on a component electrically attached with the substrate. The galvanic potential of the structural layer is greater than the galvanic potential of the component. At least a portion of the structural material is covered with a protective material that has a galvanic potential less than or equal to the galvanic potential of the component. The sacrificial material is removed with a release solution. At least one of the protective material and release solution is surfactanated, the surfactant functionalizing a surface of the component.
US Patent 07560037 Surfactant-enhanced protection of micromechanical components from galvanic degradation US Patent 7560037 Surfactant-enhanced protection of micromechanical components from galvanic degradation
US Patent 07560037 Surfactant-enhanced protection of micromechanical components from galvanic degradation
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