Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 14, 2009
Patent Application Number
11167463
Date Filed
June 27, 2005
Patent Primary Examiner
Patent abstract
Here is presented a versatile technique for machining of nanometer-scale features using tightly-focused ultrashort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of materials. The features may be extremely small (<20 nm) and are highly reproducible.
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