US Patent 7561278 Interferometer using integrated retarders to reduce physical volume

Patent 7561278 was granted and assigned to Zygo Corporation on July, 2009 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Zygo Corporation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7561278

Date of Patent

July 14, 2009

Patent Application Number

11582869

Date Filed

October 18, 2006

Patent Primary Examiner

‌

Michael A Lyons

Patent abstract

An apparatus includes an interferometer having a polarizing beam splitter to split an input beam into a measurement beam and a reference beam, the measurement beam contacting a measurement object, the reference beam contacting a reference object. The interferometer includes at least one thin retarder on a surface of the interferometer.

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