Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 14, 2009
Patent Application Number
11655984
Date Filed
January 22, 2007
Patent Primary Examiner
Patent abstract
With technical surfaces, in particular in semiconductor manufacture, it is a regular requirement to determine the reflection coefficient. For this purpose, a model spectrum of an object of a plurality of wavelengths and a defined number of intermediate points is calculated. To increase the calculating speed, the defined number of intermediate points is calculated prior to the execution of the calculation.
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