Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael D. Goodner0
Date of Patent
July 21, 2009
0Patent Application Number
109845950
Date Filed
November 8, 2004
0Patent Primary Examiner
Patent abstract
A method for forming a high mechanical strength, low k, interlayer dielectric material with aluminosilicate precursors so that aluminum is facilely incorporated into the silicon matrix of the material, and an integrated circuit device comprising one or more high-strength, low-k interlayer dielectric layers so formed.
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