US Patent 7566522 Chemically amplified resist composition

Patent 7566522 was granted and assigned to Sumitomo Chemical on July, 2009 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Sumitomo Chemical

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7566522

Date of Patent

July 28, 2009

Patent Application Number

12000316

Date Filed

December 11, 2007

Patent Primary Examiner

‌

John S. Chu

Patent abstract

The present invention provides a chemically amplified resist composition comprising a resin which comprises a structural unit having an acid-labile group and a structural unit represented by the formula (I):

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