Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 28, 2009
Patent Application Number
12214994
Date Filed
June 24, 2008
Patent Primary Examiner
Patent abstract
The present invention provides a method of manufacturing an yttria (Y2O3) sintered body having high density and excellent plasma-resistance. The yttria sintered body has a structure in which a Y2O3 crystal and a Y3BO6 crystal are included as the constituent crystal thereof. In production of the yttria sintered body, a boron oxide (B2O3) of 0.02 wt % to 10 wt % is added to an yttria (Y2O3) powder, the mixed powder is formed, and thereafter sintered at 1300-1600° C.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
