US Patent 7568281 Substrate accommodating tray pallet and substrate transfer system
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Patent Inventor Names
Hideo Taniguchi0
Hiroto Shibata0
Takenori Yoshizawa0
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Patent abstract
A substrate accommodating tray pallet has a substrate in a horizontal state, includes openings for inserting substrate removal tools for raising the substrate, and is used for transferring substrate accommodating trays which can be vertically stacked, wherein: the substrate accommodating trays are to be mounted on an upper surface; and substrate removal tool insertion openings for inserting the substrate removal tools are positioned so as to oppose openings of the mounted substrate accommodating trays.
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US Patent 07568281 Substrate accommodating tray pallet and substrate transfer system US Patent 7568281 Substrate accommodating tray pallet and substrate transfer system
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Patent Number
07568281
Patent Number
7568281
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US Patent 07568281 Substrate accommodating tray pallet and substrate transfer system
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Is a
Patent jurisdiction
Patent number
07568281
Date of patent
August 4, 2009
Patent application number
10947235
Date Filed
September 23, 2004
Patent primary examiner
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