Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kia Silverbrook0
Samuel George Mallinson0
Date of Patent
August 4, 2009
0Patent Application Number
118299430
Date Filed
July 29, 2007
0Patent Primary Examiner
Patent abstract
The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines sealed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer to form a sealed reference chamber. A cap defines apertures. The cap extends from the substrate assembly to cover the membrane and thereby form an apertured chamber.
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