Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 4, 2009
Patent Application Number
11798090
Date Filed
May 10, 2007
Patent Primary Examiner
Patent abstract
The substrate transportation apparatus 10 comprises a plurality of transportation rollers 22A-22D disposed at a predetermined spacing for transporting the substrate 40 in response to rotation of the transportation rollers 22. Each of the transportation rollers 22 is generally hollow cylindrical member formed with a plurality of slit nozzles 24 in the circumference. Alternating rows of the transportation rollers 22 are designed to blow and suck air to and from the bottom surface of the substrate 40 under transportation while preventing dust or any other foreign materials from collecting on the bottom surface of the substrate 40.
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