US Patent 7572096 Vacuum pump

A vacuum pump is provided in which gas molecules in a vacuum chamber are sucked and exhausted by the rotational motion of a rotor rotatably supported in a pump case. At least one nickel alloy layer is disposed on a surface of at least one component defining a flow path in the vacuum pump for increasing a resistance of the component to corrosion due to a corrosive effect of a gas flowing through the flowpath. A nickel oxide is formed on a surface of the nickel alloy layer and has a higher emissivity than that of the nickel alloy layer for increasing a quantity of heat radiated from the surface of the component when the component is heated during operation of the vacuum pump.