Patent 7573277 was granted and assigned to Wintek on August, 2009 by the United States Patent and Trademark Office.
A thin film probe card includes a plate and a plurality of wires on the plate, each of which is electrically connected with at least a thin film probe. A plurality of elastic members are provided between the probes, which absorbs the force of the probes in the test to protect the probes from wear and extend the product life of the probe card.