US Patent 7573625 Multiharmonic galvanometric scanning device

A scanning apparatus for a printer or similar instrument. A multiharmonic oscillator is used to provide a composite motion of a laser beam or other light beam to scan an imaging surface. The multiharmonic oscillator may have multiple sections each having a different resonant frequency. One section includes a reflector that intercepts the light beam, and drive electronics move the reflector so the light beam scans the imaging surface. Linear and complex non-linear motions of the light beam may be achieved. Microelectromechanical systems (MEMS) technology may be used to fabricate the oscillator.