US Patent 7573658 Optical element holding apparatus and exposure apparatus
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Patent Inventor Names
Ichiro Onuki0
Jun Ota0
Kenichi Kobayashi0
Kenji Yoshida0
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Patent abstract
A holding apparatus for holding an optical element includes a driving part configured to move the optical element, and a measuring part configured to measure a coordinate of the optical element, wherein number of coordinates measured by the measuring part among a degree of freedom of the optical element is greater than a driving degree of freedom of the driving part.
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US Patent 07573658 Optical element holding apparatus and exposure apparatus US Patent 7573658 Optical element holding apparatus and exposure apparatus
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Patent Number
075736580
Patent Number
75736580
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Patent Jurisdiction
Patent Number
075736580
Date of Patent
August 11, 2009
0Patent Application Number
119252710
Date Filed
October 26, 2007
0Official Website
Patent Primary Examiner
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US Patent 07573658 Optical element holding apparatus and exposure apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07573658
Date of patent
August 11, 2009
Patent application number
11925271
Date Filed
October 26, 2007
Patent primary examiner
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