US Patent 7575634 Coating device and coating film forming method
Patent 7575634 was granted and assigned to Tokyo Electron on August, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 17, 2003
0
Date of Patent
August 18, 2009
0
Patent Application Number
10538727
0
Patent Inventor Names
Hideo Shite
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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