Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshiyuki Takata0
Satoshi Yamaguchi0
Satoshi Yamamoto0
Date of Patent
August 18, 2009
0Patent Application Number
120211490
Date Filed
January 28, 2008
0Patent Primary Examiner
Patent abstract
The present invention provides a chemically amplified resist composition comprising:a resin which comprises a structural unit having an acid-labile group and a structural unit represented by the formula (I):
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