Patent attributes
A differential liquid pressure sensor (10) has an upper housing (12) that mounts a connector portion (12a) and receives in a recess a sense element module (14). The sense element module is a body in which a generally U-shaped oil filled passageway (14h) is formed with openings at opposite ends provided on respective first and second diaphragm mounting surfaces. A fluid pressure sense element, such as a piezoresistive sense element (15) is disposed in one of the passageway openings and flexible metal diaphragms (14a, 14b) are mounted on the respective diaphragm mounting surfaces of the module facing a common direction. A lower housing (18) having first and second port connections for the respective diaphragms is disposed on the lower surface of the module.