Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
September 1, 2009
Patent Application Number
11487299
Date Filed
July 14, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method and system that provides a processing chamber associated with a load lock chamber. A sample receiving stage coupled to a sample positioning apparatus is configured to move between an introduction position and a processing analysis position within the process chamber. The sample receiving stage is used to result in a sealed barrier between the process chamber and the associated load lock chamber when in the introduction position.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
