Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yukihiro Matsushita0
Yoshihiko Taira0
Youji Houki0
Date of Patent
September 1, 2009
0Patent Application Number
120266100
Date Filed
February 6, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The exposure apparatus is provided with: plural light emitting elements that are arranged in a line; a substrate that the plural light emitting elements are arranged thereon; plural temperature measuring units that are arranged along the arrangement direction of the plural light emitting elements and measure temperatures of the substrate on which the plural light emitting elements are arranged; and plural heating units that are arranged along the arrangement direction of the plural light emitting elements and heat the substrate on the basis of the temperatures measured by the temperature measuring units respectively.
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